发明名称 Non-volatile memory with carbon nanotubes
摘要 Floating-gate memory cells having carbon nanotubes interposed between the substrate and the tunnel dielectric layer facilitate ballistic injection of charge into the floating gate. The carbon nanotubes may extend across the entire channel region or a portion of the channel region. For some embodiments, the carbon nanotubes may be concentrated near the source/drain regions. For some embodiments, the tunnel dielectric layer may adjoin the substrate in at least a portion of the channel region.
申请公布号 US2007018228(A1) 申请公布日期 2007.01.25
申请号 US20050185320 申请日期 2005.07.20
申请人 MICRON TECHNOLOGY, INC. 发明人 SANDHU GURTEJ S.;MOULI CHANDRA
分类号 H01L29/788 主分类号 H01L29/788
代理机构 代理人
主权项
地址