| 摘要 |
By way of example, in this example of the invention, it would also be possible to dispense in a manner which is not illustrated with the spring elements 2 , and then for the element 1 to carry out an oscillating translational deflection. The invention relates to micromechanical optical elements having a reflective surface which can be deflected electrostatically or electromagnetically in a known manner and which can be used for a large number of applications. The object of the invention is to provide an element such as this at low cost and with improved dynamic deformation behaviour. The elements according to the invention with a reflective surface are in this case held by spring elements, in which case the element which can be deflected is held on mutually opposite sides by in each case at least two mutually independent spring elements.
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