发明名称 |
Charged-particle beam instrument and method of detecting information from specimen using charged-particle beam |
摘要 |
A charged-particle beam instrument and method are offered which can inspect side and rear surfaces of the outer periphery of a specimen. The instrument has a source of the charged-particle beam and an objective lens for focusing the beam onto the specimen positioned inside a specimen chamber. The instrument further includes an electrostatic electrode and a deflection voltage power supply for applying a deflection voltage to the electrostatic electrode located on a downstream side of the objective lens. The electrostatic electrode reflects or deflects the beam passed through the objective lens such that the beam is directed at the specimen.
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申请公布号 |
US2007018100(A1) |
申请公布日期 |
2007.01.25 |
申请号 |
US20060479975 |
申请日期 |
2006.06.30 |
申请人 |
JEOL LTD. |
发明人 |
TANAKA YUKIHIRO;SAITO MANABU |
分类号 |
G01N23/00 |
主分类号 |
G01N23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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