发明名称 PIEZOELECTRIC DEVICE, METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To obtain a high accuracy in the frequency adjustment of a piezoelectric device, a compact and thin piezoelectric device. <P>SOLUTION: A piezoelectric device 20 having a piezoelectric element 2 accommodated in a package 3 comprises a TAB substrate 5 having the piezoelectric element 2 mounted thereon to be electrically connected thereto, a driving IC 26 electrically connected to the TAB substrate 5, and a lid member 12 made of a transparent material for accommodating the piezoelectric device 20. The lid member 12 is anodically bonded to the driving IC 26, and the piezoelectric element 2 is sealed by the lid member 12 and the driving IC 26. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007019310(A) 申请公布日期 2007.01.25
申请号 JP20050200130 申请日期 2005.07.08
申请人 SEIKO EPSON CORP 发明人 IMAMURA MINEHIRO
分类号 H01L41/09;G01C19/56;H03H3/04;H03H9/02 主分类号 H01L41/09
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