摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a high accuracy in the frequency adjustment of a piezoelectric device, a compact and thin piezoelectric device. <P>SOLUTION: A piezoelectric device 20 having a piezoelectric element 2 accommodated in a package 3 comprises a TAB substrate 5 having the piezoelectric element 2 mounted thereon to be electrically connected thereto, a driving IC 26 electrically connected to the TAB substrate 5, and a lid member 12 made of a transparent material for accommodating the piezoelectric device 20. The lid member 12 is anodically bonded to the driving IC 26, and the piezoelectric element 2 is sealed by the lid member 12 and the driving IC 26. <P>COPYRIGHT: (C)2007,JPO&INPIT |