| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet light source device, capable of generating vacuum ultraviolet rays or ultraviolet rays required for using, for actual industry, the vacuum ultraviolet rays expected to be applied to many industrial fields, high in luminance and luminous efficiency and small in width, of which the pulse width is set below 100 nsec, as needed. SOLUTION: This ultraviolet light source device comprises an electron beam generating part 1 for generating an electron beam 8 having high energy; a light generation part 15, filled with a discharge gas 19 containing a rare gas; an electron beam transmission window 13 for separating the electron beam generating part 1 and the light generation part 15 from each other to keep airtightness of each of them and for transmitting the electron beam 8, generated by the electron beam generation part 1, into the light generation part 15; and a light transmitting window 18 for extracting ultraviolet rays 20 generated by the light generation part 15 to the outside. Excimer is generated by the light generation part 15, by making incident the electron beam 8, having high energy generated by the electron beam generation part 1, into the discharge gas 19 and vacuum-ultraviolet rays or ultraviolet rays 20 are generated. COPYRIGHT: (C)2007,JPO&INPIT |
