| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyance device having a configuration suitable for an annular conveyance passage based on the technology for transmitting power by using the attraction force of a magnet. SOLUTION: This conveyance device can make rounds and run at fixed speed by attaching a hanger 11 for loading a wafer on it to a carrier 12 along the conveyance passage. Plate-like bodies 20 constituted by forming N poles and S poles alternately like strips of paper at predetermined angles to the direction of running and connecting them annularly through a connection means 3 and a circular cylinder-like body 21 attached rotatably along the conveyance passage to let attraction force of different poles act in a non-contact manner with these plate-like bodies 20, letting the N poles and the S poles polarise on a rotary shaft alternately like strips of paper at predetermined angles, and arranged in a predetermined region of a substantially straight part of the conveyance passage are used as a transmission mechanism 2 for transmitting running force to the carrier 12. COPYRIGHT: (C)2007,JPO&INPIT
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