| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece processing device, eliminating the need of using an expensive robot arm to relatively displace a workpiece and a tool in three-dimensional direction and securing a large space for a table for moving the workpiece. SOLUTION: In this workpiece processing device, while the tool and the workpiece are in contact with each other, the tool and the workpiece are relatively displaced in three-dimensional direction to process the workpiece. The device includes: a tool holder holding the tool and reciprocating in a first direction and in a second direction orthogonal thereto; and a workpiece moving table holding the workpiece and reciprocating in the first direction and in a third direction orthogonal to the second direction. COPYRIGHT: (C)2007,JPO&INPIT
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