| 摘要 |
PROBLEM TO BE SOLVED: To provide a using method of a substrate conveying and dust removing device, which realizes a stable carrier even in case of the thin substrate having a flexibility and an increase of a suction power of dusts or the like such that no slack and vibration is produced when a tip of the substrate is introduced into a cleaning unit, and at the same time, so as to increase the suction power to the downside by adjusting a balance of Venturi effect, and the substrate conveying and dust removing device. SOLUTION: In the substrate conveying and dust removing device and its using method, a longitudinal direction of a suction slit of air suction chambers 211 and 213 of the downside cleaning unit 210 is arranged so as to be substantially perpendicular to a substrate carrier direction (a), at the same time, a side direction of the substrate G is in a slanted state at the predetermined crossed axes angleαto the substantially vertical direction of the substrate carrier direction (a), and the tip of the substrate G is subjected to the dust removing while being carried by the downside cleaning unit 210 so as to be at the forefront. COPYRIGHT: (C)2007,JPO&INPIT
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