| 摘要 |
<p>A cassette for loading reticles is provided to prevent the reticle from being damaged during unloading a robot arm by forming a door, such that the door is protruded toward a main body. A cassette for loading reticles includes a main body(111), a cover unit(113), a clamp, a door(115), and a pressuring bar(130). The main body includes a space, to which the reticles are horizontally inserted, a reticle support, and plural reticle mounts. The reticle support is formed along an outer periphery of the space. The reticle mounts levitate the reticles from the reticle support by a predetermined distance. The cover unit is rotatably installed at a rear portion of the main body and covers the main body. The clamp is attached to sidewalls of the main body and removably attaches the cover unit to the main body. The door is elongated from a side portion of the main body by a predetermined length and rotatably formed on a front surface of the cover unit. The pressuring bar is formed to be protruded from an inner portion of the door toward the main body. When the door is closed, the pressuring bar arranges the reticles in the space, such that the reticles are not moved in a horizontal direction.</p> |
