PROBING DEVICE FOR DOUBLE-SIDED LIGHT EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To realize a probing device efficiently measuring a double-sided light emitting element.

SOLUTION: The probing device for a double-sided light emitting inspects the light emitting element which emits light from both front and rear faces. The probing device includes: a stage 45 for holding the front or rear face of the light emitting element; and a head 3 provided above the stage and having a probe 31 coming into contact with a terminal of the element. The head includes upper light detection means 33 and 35 for measuring light emitting characteristics of the light emitting element. The stage 45 is transparent, and includes lower light detection means 52 and 54 provided under the stage for measuring the light emitting characteristics of the element.

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