| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier system for a semiconductor wafer or the like capable of improving a carrying efficiency and a working efficiency, shortening a carrying time and reducing an equipment cost. SOLUTION: The carrier system 10 conducts carriages among working devices for wafer carriers WC to a plurality of various working devices A to H and R. The carrier system 10 has a plurality of basic carrier modules M constituted so as to conduct the carriages among the working devices to the working devices in a specified base number and a relay platform TP relaying the carriages of wafers among mutually adjacent basic carrier modules. In the system, each basic carrier module has a single carrying path 14 arranged along the corresponding working devices and a single carrier 16 being guided by the carrying path and being capable of being moved in both forward and reverse directions. According to the constitution, a skip forward-movement/reverse-movement carriage can be conducted without fitting a loop and a bypass carrying path and without the danger of stagnations and collisions among the carriers. COPYRIGHT: (C)2007,JPO&INPIT
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