| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device capable of easily inspecting the internal surface if the object to be inspected is a cylindrical shape, and capable of inspecting a wide region with once movement, if the surface of the object is a flat surface. SOLUTION: The surface inspection device in which the light projection optical fiber 3 for projecting inspection light on the object 1, and the light receiving optical fibers 4a and 4b provided in the optical fiber holding cylinder 5, detecting the surface flaw, or foreign matter etc., of the object 1 by judging from the detection amount of reflection light received by the light receiving optical fiber 4a and 4b, is provided with: the light path alteration means LA for altering the light path of the inspection light and reflection light e.g. at right angles with the axial line of the optical fiber holding cylinder 5; the light converging means LC for converging the inspection light to the inspection object 1 and converging the reflection light to the light receiving optical fibers 4a and 4b; and the rotation means RA for rotating at least the light path alteration means LA around the axial line 5C. COPYRIGHT: (C)2007,JPO&INPIT
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