| 摘要 |
PROBLEM TO BE SOLVED: To precisely perform edge measurement, even if a light source having a high diffusability is used, by an image measuring apparatus for performing edge measurement of a measuring object by processing images picked up under transmitted illumination. SOLUTION: The image measuring apparatus 1 performs the edge measurement of the measuring object 9 by processing the images picked up by an imaging means 20 under the transmitted illumination by illumination light from a light source 10, and the light source 10 and the imaging means 20 are counterposed with the measuring object 9 between. The apparatus 1 is composed by providing a first circularly polarizing plate 40 put between the light source 10 and the object 9 to convert the illumination light from the light source 10 into circularly polarized light in a predetermined direction of rotation, and a second circularly polarizing plate 45 put between the object 9 and the imaging means 20, to transmit the circularly polarized light in the predetermined direction of rotation and shade rays of circularly polarized light in this predetermined direction of rotation and in its reverse direction of rotation. COPYRIGHT: (C)2007,JPO&INPIT
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