| 摘要 |
PROBLEM TO BE SOLVED: To simplify the structure, to increase the accuracy, and to provide a sufficient responsiveness, in a hydrogen pressure sensor for detecting the hydrogen pressure in mixture gas. SOLUTION: The periphery of a pair of mutually facing substrates 12 and 13 is sealed with a spacer 14 using an MEMS technology or the like, thereby forming a sealed inner volume as a vacuum atmosphere. At least one of the pair of substrates 12 and 13 has flexibility, and at least one has hydrogen permeability. Variation of the inner volume due to hydrogen permeation is detected based on the variation of capacitance between the facing electrodes 15 and 16. Therefore, this sensor can be prepared in a simple process, and has higher accuracy and more sufficient responsiveness than a strain gauge or the like. Consumed electric current for detection can be reduced. COPYRIGHT: (C)2007,JPO&INPIT
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