| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a physical quantity sensor which can detect a direction and acceleration in three-dimensional space with high precision in a lead frame used for a physical quantity sensor measuring the direction of a physical quantity such as magnetism and gravity. SOLUTION: The physical quantity sensor 51 comprises stage sections 7, 9 formed in nearly a platelike, physical quantity sensor chips 3, 5 arranged on the stage sections 7, 9, a lead 17 which is arranged around the stage sections 7, 9 and is electrically connected with the physical quantity sensor chips 3, 5, and a package section 49 which fixes the stage sections 7, 9, physical quantity sensor chips 3, 5, and the lead 17 integrally. The physical quantity sensor chips 3, 5 are bonded to surfaces 7a, 9a of the stage sections 7, 9 through inclined members 19, 21 formed in nearly a wedge shape. COPYRIGHT: (C)2007,JPO&INPIT
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