| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact in-line buffer device which is superior in efficiency of the temporary storage work at low cost. SOLUTION: The in-line buffer device comprises a temporary storage mechanism 22 which is arranged above a conveying path of a conveyor device 11, and projected onto the conveying path from its lower side, and lifts a substrate 12 to be inspected upwardly and stores it temporarily, an elevating/lowering mechanism 23 for vertically elevating/lowering the temporary storage mechanism 22, and a positioning mechanism for attaching the substrate 12 to the temporary storage mechanism 22. The temporary storage mechanism 22 comprises a stay 27 which is elevated and projected onto the conveying path of the conveyor device 11 from its lower side, a plurality of substrate receiving parts 28 which are provided on the stay 27 and support and lift an object to be conveyed by the elevation of the stay, and a stopper 30 for positioning the substrate 12. The positioning mechanism has a sensor for detecting the position of the substrate 12, and the temporary storage mechanism 22 has a width adjustment unit for adjusting the width thereof according to the width of the substrate 12. COPYRIGHT: (C)2007,JPO&INPIT
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