| 摘要 |
PROBLEM TO BE SOLVED: To prevent an unexpected breakage from occurring on a silicon substrate in a manufacturing process of a liquid droplet-discharging head, and in addition, to provide a method or the like which does not generate foreign matters affecting the manufacture. SOLUTION: This method for manufacturing the liquid droplet-discharging head has at least a bonding process and a process in which a wet etching is performed. In the bonding process, the silicon substrate 41 and a glass substrate 2 are bonded by making the silicon substrate and the surface having a recess section 9 of the glass substrate face each other. In this case, the silicon substrate 41 becomes a cavity plate 1 on which at least a recess section becoming a discharging chamber 5 for storing a liquid to be discharged as liquid droplets is formed. The glass substrate 2 has the recess section 9 in which an electrode 8 for deforming the discharging chamber 5 when power is fed is provided. In the second process, after the bonding process, the recess section becoming the discharging chamber 5 is formed on the silicon substrate, and the wet etching for leaving a section which becomes an electrode take-out port 25 by a specified thickness is performed. In this case, the section becoming the electrode take-out port 25 is formed for electrically connecting the electrode 8 and an external power feeding means in the silicon substrate. COPYRIGHT: (C)2007,JPO&INPIT
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