发明名称 |
Method and apparatus for monitoring and evaluating operation of a piezoelectric actuator |
摘要 |
The invention relates to a method for the monitoring and evaluation of the operation of a piezoelectric actuator, wherein electrical discharging and charging processes of the actuator are monitored and the operation of the actuator is evaluated with reference to the time course of the discharging and charging processes. The invention further relates to an apparatus for the carrying out of the method.
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申请公布号 |
US2007018534(A1) |
申请公布日期 |
2007.01.25 |
申请号 |
US20060489823 |
申请日期 |
2006.07.20 |
申请人 |
SCIORTINO GIACOMO;GOAT CHRISTOPHER A |
发明人 |
SCIORTINO GIACOMO;GOAT CHRISTOPHER A. |
分类号 |
H01L41/107 |
主分类号 |
H01L41/107 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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