发明名称 |
Fabrication method of composite metal oxide dielectric film, and composite metal oxide dielectric film fabricated thereby |
摘要 |
The invention relates to a fabrication method of a composite metal oxide dielectric film containing at least two metallic elements on a substrate, and a composite metal oxide dielectric film fabricated thereby. The method includes: forming an amorphous film containing at least one of the metallic elements; preparing a hydrothermal solution where a precursor of the remaining element of the metallic elements is mixed; immersing the amorphous film into the hydrothermal solution; and hydrothermally treating the amorphous film so that the remaining one of the metallic elements is synthesized to the amorphous film, thereby forming a crystallized composite metal oxide film.
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申请公布号 |
US2007020955(A1) |
申请公布日期 |
2007.01.25 |
申请号 |
US20060490230 |
申请日期 |
2006.07.21 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
SONG WON H.;CHUNG YUL K.;LIM SUNG T. |
分类号 |
H01L21/31 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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