摘要 |
A method for recovery of degradation caused by avalanche hot carriers is provided that includes subjecting an idle bipolar transistor exhibiting avalanche degradation to a thermal anneal step which increases temperature of the transistor thereby recovering the avalanche degradation of the bipolar transistor. In one embodiment, the annealing source is a self-heating structure that is a Si-containing resistor that is located side by side with an emitter of the bipolar transistor. During the recovering step, the bipolar transistor including the self-heating structure is placed in the idle mode (i.e., without bias) and a current from a separate circuit is flown through the self-heating structure. In another embodiment of the present, the annealing step is a result of providing a high forward current (around the peak fT current or greater) to the bipolar transistor while operating below the avalanche condition (V<SUB>CB</SUB> of less than 1 V). Under the above conditions, about 40% or greater of the degradation can be recovered. In yet another embodiment of the present invention, the thermal annealing step may include a rapid thermal anneal (RTA), a furnace anneal, a laser anneal or a spike anneal.
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申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;GUARIN, FERNANDO;HOSTETTER, J., EDWIN, JR.;RAUCH, STEWART, E., III.;WANG, PING-CHUAN;YANG, ZHIJIAN, J. |
发明人 |
GUARIN, FERNANDO;HOSTETTER, J., EDWIN, JR.;RAUCH, STEWART, E., III.;WANG, PING-CHUAN;YANG, ZHIJIAN, J. |