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发明名称
METHOD FOR THE PRODUCTION OF AN INTEGRATED CIRCUIT ARRANGEMENT WITH AT LEAST A CAPACITOR
摘要
申请公布号
EP1212782(B1)
申请公布日期
2007.01.24
申请号
EP20000972582
申请日期
2000.09.06
申请人
INFINEON TECHNOLOGIES AG
发明人
SCHUMANN, DIRK;SELL, BERNHARD;WILLER, JOSEF
分类号
H01L27/108;H01L21/00;H01L21/8242;H01L21/02
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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