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发明名称
Ultra-uniform silicides in integrated circuit technology
摘要
申请公布号
GB2419233(B)
申请公布日期
2007.01.24
申请号
GB20050026401
申请日期
2004.07.06
申请人
ADVANCED MICRO DEVICES, INC
发明人
ROBERT J CHIU;JEFFREY P PATTON;PAUL R BESSER;MINH VAN NGO
分类号
H01L21/285
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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