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发明名称
N-Sulfonyloxyimide Compounds and Radiation Sensitive Resin Compositions Using the Same
摘要
申请公布号
KR100673500(B1)
申请公布日期
2007.01.24
申请号
KR20000066069
申请日期
2000.11.08
申请人
发明人
分类号
G03F7/028;C07D207/46;C07D209/76;G03F7/004;G03F7/038;G03F7/039
主分类号
G03F7/028
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代理人
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