| 摘要 |
<p>An insulating-film-forming composition including an organic solvent and a hydrolysis-condensation product which is obtained by hydrolysis and condensation of a component (A) in the presence of a component (B), the component (A) being at least one silane compound selected from a group consisting of compounds shown by the following formulas (1) to (3),
€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒR a Si(OR 1 ) 4-a €ƒ€ƒ€ƒ€ƒ€ƒ(1)
€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒSi(OR 2 ) 4 €ƒ€ƒ€ƒ€ƒ€ƒ(2)
€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒR 3 b (R 4 O) 3-b Si-(R 7 ) d -Si(OR 5 ) 3-c R 6 c €ƒ€ƒ€ƒ€ƒ€ƒ(3)
wherein the component (B) is a polycarbosilane having a main chain structure shown by the formula -(Si-CH 2 ) x - and containing a structure shown by the following formula (4), a structure shown by the following formula (5), a structure shown by the following formula (6), and a structure shown by the following formula (7),
wherein R 8 is selected from a group consisting of a hydrogen atom, a halogen atom, a hydroxyl group, an alkoxyl group, and an acyloxyl group,
wherein R 9 and R 10 are individually selected from the group consisting of a hydrogen atom, a halogen atom, a hydroxyl group, an alkoxyl group, and an acyloxyl group,
wherein R 11 to R 13 are individually selected from the group consisting of a hydrogen atom, a halogen atom, a hydroxyl group, an alkoxyl group, and an acyloxyl group.</p> |
