MATCH BOX HAVING APPARATUS FOR DETECTING NOISE

摘要

A match box having a noise detecting apparatus is provided to reduce process loss caused by noise generated in RF power transferred to a process chamber by detecting the generation of noise in RF power. A match box(12) supplies RF to a process chamber for fabricating a semiconductor device. A coaxial cable for connecting an RF generator(10) for generating RF to the match box is coupled to a joint part. A noise detecting apparatus(20) senses the noise generated by a coupling defect of the coaxial cable at the joint part. The noise sensing by the noise detecting apparatus is performed prior to a sensing of noise and leak during a fabricating process in the process chamber.