发明名称
摘要 A capacitor includes a substrate, an insulating layer on the substrate, the insulating layer having a contact hole, a first storage node in the contact hole and on the insulating layer, a second storage node on a peripheral portion of the first storage node, the second storage node having a planar top surface, a dielectric layer on the surface of the first and second storage nodes, and a plate node on the dielectric layer.
申请公布号 JP3872174(B2) 申请公布日期 2007.01.24
申请号 JP19970177132 申请日期 1997.07.02
申请人 发明人
分类号 H01L21/8242;H01L27/04;H01L21/02;H01L21/822;H01L27/108;H01L29/92 主分类号 H01L21/8242
代理机构 代理人
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