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发明名称
Base stabilization system
摘要
申请公布号
EP1373877(B1)
申请公布日期
2007.01.24
申请号
EP20020733812
申请日期
2002.03.01
申请人
CYMER, INC.
发明人
LUBLIN, LEONARD;WARKENTIN, DAVID J.;PLETNER, BARUCH;RULE, JOHN, A.
分类号
G03F7/20;G05D3/00;F16F15/00;F16F15/02;F16F15/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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