| 摘要 |
A molecular beam source for using an organic thin-film deposition is provided to comprise a stable thin-film layer by preventing an unexpected emission of steam from a steam emission source. An external guide(13) having a taper-shaped guiding wall is formed at a molecular emission outlet(14). The molecular emission outlet emits a molecular on a surface of a thin-film layer. An internal guide(16) having a taper-shaped guiding wall is formed at an inner side of the external guide. A molecular emission way(17) is formed between the internal guide and the external guide. A heater(15) for heating the molecular is formed at the molecular emission way. |
