AN IONIZER USING SOFT X-RAY AND A METHOD FOR REMOVING ELECTRIC CHARGES OF A CHARGED BODY

摘要

An ionizer using a soft X-ray and a method for removing electric charges of a charged body are provided to increase stability by depositing silver on a beryllium window as a target material. An ionizer using a soft X-ray includes a heat unit and a control unit. In the heat unit, a tube generates electrons. A target attracts the electrons generated at the tube by a voltage difference. An output window discharges the soft X-ray generated by a collision of the electrons at the target. A flange unit(320) is thermally and electrically connected to the output window. The flange unit(320) forms a front portion of an X-ray tube by being connected to the front portion of the X-ray tube. A flange coupler(330) has thermal conductivity and electric conductivity and forms one external surface with the flange surface by being integrated as one body. A protection vessel side surface part(350) is formed to be fixed to the external surface by a predetermined connection unit. A high voltage generation unit(350) supplies a high voltage to the X-ray tube. And, a protection vessel cover unit(370) is formed to perform functions of top and bottom portions of the protection vessel side surface parts(350) and one side surface part.