INJECTION PLATE, ETCH APPARATUS COMPRISING SHOWER HEAD WITH THE SAME PLATE AND METHOD OF CHANGING SHOWER HEAD IN THE SAME APPARATUS

摘要

An injection plate is provided to avoid waste in replacing an excessively left injection plate by using at least two plates made of silicon as an injection plate of a shower head and by replacing only the lower plate etched by an etch process. At least two circular plates are stacked in an injection plate(360), made of silicon and including a plurality of etch gas injecting holes in a shower head(300) of an etching apparatus. The injection plate has a thickness of 5 millimeters, including at least two plates such as an upper plate and a lower plate.