| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film thickness measuring method for precisely measuring the thickness of the thin film of a body substance and an organic substance such as an organic compound. SOLUTION: In the thin-film thickness measuring method due to internal reflection type ellipsometory, a thin-film sample 4 is irradiated with incident light via a prism 2 for measuring thickness. The thin-film sample 4 is formed on one surface of the prism 2 made of glass and has a refractive index that is smaller than that of the prism 2 by approximately 0.2 or more. In this case, the refractive index of the prism 2 made of glass is preferably approximately 1.60 to 2.00. Additionally, the refractive index of the prism 2 is set to approximately 1.40 to 1.60, and a high-refractive-index film having a refractive index being larger than that of the prism 2 by approximately 0.2 or more may be provided between the prism 2 and the thin-film sample 4. COPYRIGHT: (C)2004,JPO |
