| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a foreign matter detection method, a foreign matter detection program, and a foreign matter detector, having high detection sensitivity on thin line-shaped foreign matter. <P>SOLUTION: This foreign matter detection method for detecting whether foreign matter has got mixed in an object under inspection by processing an image of X rays transmitted by the object, comprises a stage S2 for generating a gray edge stressed image by stressing gray edges in the X-ray image, a stage S3 for generating a mask pattern from the X-ray image, and a stage S4 for extracting a foreign matter candidate by using a first threshold set for foreign matter candidate extraction from the stressed image, finding an estimated volume of the matter candidate by means of addition/subtraction by referring to the mask pattern, and comparing the estimated volume with a second threshold set for foreign matter determination to determine foreignness. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
