发明名称 Field effect transistor and method of manufacturing a field effect transistor
摘要 The transistor has gate-oxides (60, 60`, 60``), and a polycrystalline layer (40) applied on the gate oxide (60). Spacers (51, 53) are conductively connected with the polycrystalline layer, where the spacers are made from polycrystalline silicone. The gate oxide (60) has a thickness in one area below the polycrystalline layer and the gate oxides (60`, 60``) have thickness in areas below the respective spacers (51, 53). The thickness of the gate oxides (60`, 60``) in the latter areas is reduced compared with the thickness of the gate oxide (60) in the former area. An independent claim is also included for a method of manufacturing a field effect transistor.
申请公布号 EP1737028(A3) 申请公布日期 2007.01.24
申请号 EP20060013081 申请日期 2006.06.26
申请人 ATMEL GERMANY GMBH 发明人 JOODAKI, MOJTABA, DR.
分类号 H01L21/336;H01L29/423;H01L29/49 主分类号 H01L21/336
代理机构 代理人
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