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发明名称
Micromechanical electrostatic resonator
摘要
申请公布号
EP1538747(B1)
申请公布日期
2007.01.24
申请号
EP20040027961
申请日期
2004.11.25
申请人
SEIKO EPSON CORPORATION
发明人
KIHARA, RYUJI;NAKAJIMA, TAKUYA;FURUHATA, MAKOTO
分类号
B81C3/00;H03H9/00;B81B3/00;B81C1/00;H02N1/00;H02N2/00;H03H3/007;H03H9/02;H03H9/10;H03H9/24
主分类号
B81C3/00
代理机构
代理人
主权项
地址
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