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发明名称
A SPUTTERING SOURCE AND SPUTTER
摘要
申请公布号
KR100674005(B1)
申请公布日期
2007.01.24
申请号
KR20050059255
申请日期
2005.07.01
申请人
发明人
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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