MASK, MASK MANUFACTURING METHOD, FILM FORMING METHOD, ELECTRO-OPTIC DEVICE MANUFACTURING METHOD, AND ELECTRONIC APPARATUS

摘要

A mask, a mask manufacturing method, a film forming method, an electro-optic device manufacturing method, and an electronic apparatus are provided to easily perform exchange of a chip by separating a plug from a base substrate. A base substrate(10) includes an aperture portion(12). A chip(20) having an aperture pattern is arranged on the aperture portion of the base substrate. A plug is formed on the base substrate. A joint element joints the chip and the plug each other. The plug is made of different material with the base substrate. One chip has a plurality of plugs.