| 摘要 |
A reaction gas supply line for semiconductor fabricating equipment is provided to attract an operator's attention by forming an outer periphery of a reaction gas supply line to have various colors. A reaction gas supply line communicates a reaction gas source(100) generating various kinds of reaction gases with a reaction chamber in which a semiconductor fabricating process is carried out by suing the reaction gas. An outer periphery of the reaction gas supply line, through which the reaction gas flows, is formed to have various colors according to the kinds of the reaction gas supplied to the reaction chamber.
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