| 摘要 |
An XY-shaft stage is provided to minimize restriction of an installation place by installing a driving motor in the same direction, and to prevent deterioration of precision. In an XY-shaft stage, a base plate(10) has a plurality of guide blocks protruded from an upper side by a predetermined interval, a first driving motor(13) connected to the guide block, and a plurality of guide rails provided at sides of the guide blocks. An X-axis transfer block(20) has a first guide member having a transferring hole formed on the lower surface corresponding to the guide block to support a first guide rail, and a second guide rail installed to be transferred in the X-axis direction by a coaxial power transmission connected to the first driving motor and a Y-axis base(22) protruded from the upper side to cross over the first guide rail at a predetermined angle. A Y-axis transfer block(30) is installed to be transferred in the Y-axis direction by a biaxial power transmission connected to a second driving motor(33), and has a transfer hole corresponding to the Y-axis base to support the second guide rail.
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