| 摘要 |
A parylene coating method is provided to maximize wear resistance and chemical resistance by effectively pretreating the surface of a base material by plasma. The parylene coating method comprises the steps of: cleaning a base material by generating plasma, improving adhesive power with a parylene polymer film by reforming the surface of the base material, and then arranging the base material on a jig installed in a vacuum chamber; generating gaseous dimer by vaporizing parylene dimer powder; generating a parylene monomer by pyrolyzing the gaseous dimmer by a heat transfer coil(210) installed in a pipe; and supplying the parylene monomer with bypassing a baffle(311) vertically installed at an inner wall of a deposition chamber(310) and forming the parylene polymer film by depositing the parylene monomer on the base material disposed on the jig of the deposition chamber. In the step for forming the parylene polymer film on the base material in the deposition chamber, the parylene polymer is divided through supply pipes(230) communicating with a central portion of the deposition chamber and a peripheral part thereof and then jetted into the deposition chamber. |
