发明名称 TRANSFER ARM
摘要 A transfer arm is formed of a first short link, a first parallel link pivotally connected to the first short link, a second short link pivotally connected to the other ends of the first parallel link, a second parallel link pivotally connected to the second short link, and a third short link pivotally connected to the second parallel link. A linear guide is integrally formed with the first short element to extend in a direction perpendicular to the first short link. One link element of the second parallel link extends and is linearly slidably attached to the linear guide. A holding plate is connected to the third short link to be moved linearly according to a rotation of a drive shaft connected to the first parallel link while deforming parallelograms formed by the first and second parallel lines.
申请公布号 KR100671353(B1) 申请公布日期 2007.01.22
申请号 KR20000080182 申请日期 2000.12.22
申请人 发明人
分类号 H01L21/68;B25J9/10 主分类号 H01L21/68
代理机构 代理人
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