Tungsten silicide nitride as an electrode for tantalum pentoxide devices,申请号KR19990056953-传众专利搜索

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发明名称	Tungsten silicide nitride as an electrode for tantalum pentoxide devices
摘要
申请公布号	KR100671722(B1)	申请公布日期	2007.01.22
申请号	KR19990056953	申请日期	1999.12.11
申请人		发明人
分类号	H01L21/336;H01L29/78;C23C14/06;H01L21/28;H01L21/283;H01L21/285;H01L29/49;H01L29/51	主分类号	H01L21/336
代理机构		代理人
主权项
地址

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