REINFORCING STRUCTURE OF VACUUM TANK FOR PREVENTING DEFORMATION

摘要

A reinforcing structure of a vacuum tank for preventing deformation capable of keeping constant the relative positions of apparatuses and members disposed in the vacuum tank to each other by suppressing the deformation of the vacuum tank resulting from evacuation or machining accuracy. A vacuum device comprises the vacuum tank having an exhaust port part and base plate domes oppositely disposed at the bottom part of the vacuum tank. A reinforcement member is disposed in the exhaust port part or at the peripheral edge part thereof. ® KIPO & WIPO 2007