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发明名称
Method for fabricating dielectric layer in flash memory device
摘要
申请公布号
KR100673242(B1)
申请公布日期
2007.01.22
申请号
KR20050054977
申请日期
2005.06.24
申请人
发明人
分类号
H01L21/8247;H01L27/105
主分类号
H01L21/8247
代理机构
代理人
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