A STRUCTURE OF A MICRO ELECTRO MECHANICAL SYSTEM AND THE MANUFACTURING METHOD THEREOF,申请号KR20040025015-传众专利搜索

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发明名称	A STRUCTURE OF A MICRO ELECTRO MECHANICAL SYSTEM AND THE MANUFACTURING METHOD THEREOF
摘要
申请公布号	KR100672911(B1)	申请公布日期	2007.01.22
申请号	KR20040025015	申请日期	2004.04.12
申请人		发明人
分类号	B81B7/02;B81C1/00;G02B26/00;G02B26/08	主分类号	B81B7/02
代理机构		代理人
主权项
地址

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