PROCESS MONITORING METHOD WITH USE OF GASEOUS REAGENT CONTAINING ONE OR MORE GASEOUS HYDROCARBONS

摘要

FIELD: processes of chemical infiltration or chemical deposition from vapor phase, case hardening in furnace. ^ SUBSTANCE: method is used for monitoring process realized in furnace with use of gas reagent containing at least one gaseous hydrocarbon. Method comprises steps of adjusting working parameters of furnace; adding into furnace gas-reagent containing at least one gaseous hydrocarbon; discharging from furnace exhaust gases that contain by-products of gas-reagent reaction; washing out exhaust gases by means of oil that absorbs resins present in exhaust gases; receiving information related to process according to measured quantity of resins absorbed by oil. It is possible to change working parameters of furnace such as temperature, pressure in furnace, gas-reagent consumption and composition. ^ EFFECT: possibility for monitoring process in furnace without special apparatus of infiltration furnace. ^ 14 cl, 1 dwg, 1 ex