发明名称 EXHAUST GAS COLLECTION DEVICE
摘要 <p>Exhaust gas collection units (110, 120, 130) are arranged in series in an exhaust gas collection device (100) for collecting objects separated from exhaust gas passing an exhaust gas route, and inside the exhaust gas collection units (110, 120, 130) are formed exhaust gas paths for passing exhaust gas along the exhaust gas route. Collision plates are placed in an exhaust gas collection section in each of the collection units. The collision plates in the exhaust gas collection sections of the upstream side collection units (110, 120) are arranged such that a space extending in the axial direction of the exhaust path is present in the exhaust path without being blocked by any of the collision plates arranged in the exhaust path. The collision plates in the exhaust gas collection section in the exhaust gas collection unit (130) on the downstream side are arranged so that such a space is not present. Uneven distribution of the amount of accumulation of separated objects such as reaction by-products are suppressed without performing complex control, and outflow of the objects to the downstream side of the exhaust gas collection device can be reliably reduced. ® KIPO & WIPO 2007</p>
申请公布号 KR20070010045(A) 申请公布日期 2007.01.19
申请号 KR20067023056 申请日期 2006.11.03
申请人 TOKYO ELECTRON LIMITED 发明人 TSUJI NORIHIKO
分类号 B01D53/46;H01L21/00;B01D8/00;B01D45/08;C23C16/44;H01L21/02;H01L21/20;H01L21/205;H01L21/3065;H01L21/31 主分类号 B01D53/46
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