| 摘要 |
A lamp plate fixing device for semiconductor fabricating equipment is provided to prevent fastening screws from being lost when a lamp housing or a lamp plate is disassembled from a chamber. A lamp housing is installed on an upper end of a chamber(100), and has a heating lamp. A lamp plate is installed in the lamp housing to permit transmittance of heat and light. A fastening screw(400) is inserted in a fastening through-hole formed on a fastening portion(310) of the lamp housing, and is engaged with a nut(403), thereby fixing the lamp plate. A damping spring(403) is provided on an upper portion of the fastening portion. A washer(405) is interposed between the damping spring and the lamp housing.
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