| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form an alignment mark having excellent shape accuracy. SOLUTION: This alignment mark forming method includes a positioning process (A) of measuring several points of a cavity 11 formed in an outermost contour part in a glass base plate 1 where a plurality of cavities 11 are formed, measuring a point (position)P at a predetermined distance with reference to boundaries 11X, 11Y from the outer partition wall 15 using a CCD camera 3, and performing predetermined arithmetic processing based upon the measurement data to fix the position P separated at distances x, y from the boundaries as the alignment mark position; and an alignment mark forming process (B) of forming an alignment mark 19 made in a predetermined form at the point P positioned in the positioning process A using a predetermined machining means 2. COPYRIGHT: (C)2007,JPO&INPIT
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