发明名称 |
Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging |
摘要 |
A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame is provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.
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申请公布号 |
US2007012653(A1) |
申请公布日期 |
2007.01.18 |
申请号 |
US20050193127 |
申请日期 |
2005.07.28 |
申请人 |
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发明人 |
NASIRI STEVEN S.;FLANNERY ANTHONY F.JR. |
分类号 |
C23F1/00;B44C1/22;C03C15/00;H01B13/00 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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