| 摘要 |
PROBLEM TO BE SOLVED: To provide a movable element which can control an generation of a stiction and a semiconductor device, a module and an electronic device using the movable element. SOLUTION: The movable element is provided on a semiconductor base plate 1 with a signal circuit 11 to transfer a signal, a switching part 12 to make a mechanical switching of the signal circuit 11, and changing part 13 to change the switching part 12 and hold a condition after changing of the switching part 12. The above switching part 12 has a pair of a movable piece 12B and a fixed piece 12A positioned facing each other and has a contact point 12B-2 of an approximate spherical shape at least on one facing surface of the movable piece 12B and the fixed piece 12A of the switching part 12. COPYRIGHT: (C)2007,JPO&INPIT
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